摘要
用溶胶凝胶法在普通载玻片上成功地制得 Ti O2 多孔纳米薄膜。研究了 Sol- Gel工艺参数和不同烧结温度对材料结构和物相的影响。结果表明 :Ti O2 在室温至 80 0℃之间经历无定形态→锐钛矿→锐钛矿与金红石共存→金红石的相变过程 ,制备出了孔径范围 75~ 80 0 nm的 Ti O2
TiO 2 porous nanostructured thin films with pore diameters in the range 75~800nm desposited on general glass substrates were prepared successfully by Sol Gel method , the influences of the process parameters and different sintering temperatures on the structure and phase of the material were studied . The results show that TiO 2 changes its phase structure from amorphous to anatase , then to mixed phase of anatase and rutile , finally to rutile only when heat treated at various temperatures.