(CH_3)_2SiCl_2和N_2H_4反应产物为先驱体制备Si/C/N纳米微粉

Preparation of Si(C.N) Nano-size Powders from Precursor of Reaction Product between (CH_3)_2SiCl_2 and N_2H_4

采用 (CH3 ) 2 SiCl2 和N2 H4 反应产物为先驱体 ,在H2 、NH3 气条件下 ,用化学气相裂解法制备出Si/C/N纳米复合微粉这一全新的合成体系。对温度、气体流量 ,H2 /NH3 的比例等合成工艺条件对微粉的性质、形貌、组成等的影响进行了较为系统的讨论 ,并从热力学和动力学的角度初步讨论了产物裂解机理及组成的变化形成机理。所合成的Si/C/N微粉为无定型球状颗粒 ,N的含量从 1 6 4 9%～ 2 6 75 %可调 ,粒径最小达 40nm。

Using Low molecular organosilazane [(CH 3) 2NHN] n as precursor, which is reaction product between (CH 3) 2SiCl 2 and N 2H 4,Si/C/N ultrafine composite powder was synthesized by vapor reaction decomposition. The pyrolysis mechanism and reaction mechanism of gas phase precursor under H 2, NH 3 atmosphere and the influence of the pyrolysis conditions(pyrolysis temperature, gas flowing rate, H 2/NH 3 ratio) on the morphological characteristics, the composition of the powder were discussed. Nano powder is amorphous with 16 49%～26 75% Nitrogen,the least particle size about 40?nm.