硅微机械振动轮陀螺仪非线性动力分析

Nonlinear Dynamic Analysis of Silicon Micromachined Vibrating Wheel Gyroscope

本文简单介绍了硅微机械振动轮陀螺仪的工作原理，并给出了该陀螺仪的非线性运动方程和线性化运动方程．针对该陀螺仪的运动方程，进行了数值仿真研究．根据数值仿真结果，还提出为了提高测量的线性度必须采用闭环控制．同时，还给出了闭环控制的方案．

In this paper, the operation principle of micromachined vibrating wheel gyroscope is briefly introduced, and both nonlinear and linear mathematical models of micromachined vi- brating wheel gyroscope are presented. A series of simulation for motion equations has been done. The simulation results show that in order to improve the measuring linearity the closedloop control is needed. So the closed-loop control methods have been designed.