通过数据处理实现微细台阶面的测量

Measurement of Stair like Surfaces' Topography by Data-processing

分析了微细台阶面表面形貌测量可能会出现平滑或失真现象的根源 ,提出一种基于测量数据分析和数据处理的解决方法。此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。

The reason why the measuring results are probably wrong when measuring the topography of stair like surfaces is analyzed, and the new data processing method is presented, which can be applied to correct the measuring results of stair like surfaces’ topography. The method has been successfully used in the system for measuring the 3 D surface topography of diffractive optical elements.