新型三腔谐振腔增强型光探测器的理论分析和数值模拟

Studies of a New Type of Resonant-cavity-enhanced Photodetectors

提出了一种新的谐振腔增强型 (RCE)光探测器结构 ,它将器件结构中的谐振腔分为三个子腔。分析表明 ,采用这种新结构的光探测器在保留了 RCE光探测器优点的同时 ,还实现了器件量子效率及其光谱响应线宽之间制约关系的解耦 ,因而可以同时获得窄的光谱响应线宽 (<1 nm) ,高的量子效率 (>90 % )和高的响应速度。该器件可望在密集波分复用 (DWDM)

In this paper, a new type of resonant cavity enhanced (RCE) photodetector which divides the resonant cavity into three subcavities is proposed. The analysis shows that a narrower spectral response line width (<1 nm) can be obtained with a high quantum efficiency up to 90%. This means that the quantum efficiency can be decoupled from both the response speed and the spectral linewidth with such a photo detectors. This type of photo detector may be proved useful for dense wavelength division multiplexing (DWDM) applications.