摘要
提出一种用于在线三维检测的正交双频光栅。光栅在原单频条纹正交方向引入一高频条纹,用于提取调制度信息,完成检测过程中的像素匹配。解决了测量中像素匹配和相位计算对光栅频率要求不同的问题。同时高频条纹的引入不影响低频条纹求解相位,在相位求解过程中无需滤除高频条纹,避免了频谱滤波对相位精度的影响。模拟和实验均验证了所提方法的有效性。
An orthogonal two-frequency grating designed for the on-line inspection is proposed. The higher frequency fringes are introduced in the orthogonal direction of the original single frequency fringes, which are used to extract modulation and complete pixel matching in the inspection. The proposed grating can resolve the problem of pixel matching and phase calculation requiring different frequencies. In addition, the higher frequency fringes don＇t influence the low frequency fringes used for the phase calculation, and the higher frequency fringes don＇t need to be filtered. So the influence of filtering in phase calculation can be eliminated. Both numerical simulations and experiments prove the feasibility and validity of the proposed method.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2012年第5期200-205,共6页
Chinese Journal of Lasers
基金
国家863计划(2007AA01Z333)
国家重大专项(2009ZX02204-008)
四川省学术和技术带头人培养基金(07GRC-01)资助课题
关键词
测量
在线检测
相位测量轮廓术
正交双频光栅
像素匹配
相位计算
measurement
on-line inspection
phase measuring profilometry
orthogonal two-frequency grating
pixel matching
phase calculation
