摘要
光栅结构是微电子技术以及集成光学等方面常见的结构。其结构尺寸参数的测试技术在国际上已有很多年的发展历史,但还存在很大的研究和发展空间。当今比较有优势的方法是光栅衍射测量方法。该方法是基于精确的衍射理论,通过计算,可反演出目标结构的某些关键尺寸。严格耦合波分析法(RCWA)是该理论的基础。RCWA在一维情况下得到完美的实现,但对二维光栅,则存在衍射展开阶次高,收敛慢的缺陷。文章进一步研究NV-RCWA,对比多种常见周期结构使用不同法向矢量场的效果。
The grating structure is the common structure of the microelectronics technology and integrated optics, the test technology of it structure size parameters in the international arena has many years' development history, but there are still a lot of research and development space.Now, the method of comparative advantage is the grating diffraction measurement method. Based on the precise diffraction theory, through calculation, the structure of the performance goals, certain key dimensions of the goal structure were shown reversely. Strict coupled wave analysis method (RCWA) is the theory basis. RCWA get perfect realization in the one-dimensional case, but on the two-dimensional grating, then there exists defects of diffraction order high and slow convergence. Comparing several common periodic structure and using effects of the vector field of different method,NV-RCWA further was study in this paper.
出处
《大众科技》
2012年第6期78-81,共4页
Popular Science & Technology
关键词
法向矢量耦合波分析法
微电子结构
CD分析应用
The normal vector coupled wave analysis method
Microelectronic structures
CD analysis and application