凸球面基底超声波喷雾涂胶的研究

Study on Ultrasonic Spray Coating for Convex Spherical Substrate

针对大尺寸曲面元件涂布光刻胶难的问题,提出一种超声波喷雾涂胶法用于解决这一难题。以凸球面基底为例,阐述了超声波喷雾涂胶装置在凸球面基底上涂布光刻胶的过程并且给出了光刻胶膜厚和主要操作参数之间关系的数学模型。然后根据该数学模型来控制喷涂参数,在口径为100 mm,曲率半径为120 mm的凸球面基底上进行光刻胶膜厚为5μm的涂布实验。从实验结果可以得出超声波喷雾涂胶法对大尺寸凸球面基底的光刻胶涂布具有一定的借鉴作用。

In order to solve the problem of difficult to coat convex spherical substrate,a method of ultrasonic spray coating is introduced.As convex spherical substrate example,describe the process of photoresist coating on convex spherical substrate and a mathematic model of flim thickness and prime operation parameters.According to the model to control operation parameters,the film of thick of 5 μm on a 100 mm caliber and 120 mm radius of convex spherical substrate is coated.Then the result of experiment show that this method is efficient for coating convex spherical substrate.