大型真空系统氦检漏率的快速准确检测方法

A fast and exact leakage test method in helium mass spectrometer detection for large vacuum system

大型真空系统检漏往往耗时长、效率低。本文分析了氦气通过漏孔进入氦质谱检漏仪形成检漏信号的规律,并据此建立检漏信号数学模型,确定漏孔的最终稳态泄漏信号。基于上述分析,提出漏孔漏率的一种快速预测方法。该方法用于大型真空系统检漏能准确预测被检部位的漏率,能显著缩短检漏时间,提高检漏效率。

The leak detection for large vacuum system is generally time-consuming and inefficient. In this paper, it was firstly analyzed how the leak test signals come into being. Then the mathematical model of the leak test signal was established, and the final steady leak rate was ascertained. Based on the above analysis, a fast and exact leakage test method was proposed. By this means, the leak detection nethod is not only able to accurately predict the leak rate of the target leak, but also significantly decrease the leak detection time. Thus, it will enhance the leak test efficiency.