摘要
真空环境内金属电极放电产生的等离子体不同于气体放电等离子体,具有特殊的性质。本实验采用持续时间为10μs,幅值约600 A的指数变化的脉冲电源进行放电;运用朗缪尔探针法对放电生成的等离子体的相关参数进行测量,讨论了放电生成的等离子体的特性,分析了电极间距对放电等离子体密度的影响;同时运用AnsoftMaxwell3D仿真软件对电极间的电场分布情况进行了仿真分析。实验发现采用指数脉冲放电能生成高密度的等离子体,且生成的等离子体密度随电极间距增大而增大。
Vacuum discharge plasma by metal electrode is different from gas discharge, and it has special characteristics. The experiments were carried out with an index impulse discharge power with discharge current of about 600A and discharge duration of lOlLs. The parameters of metal plasma diffusing around the electrodes were measured using probe method. The characteristics of the vacuum metal plasma and the impact of discharge spacing between electrodes on the plasma density were studied. The electric field distribution between the two electrodes was simulated by the Ansoft Maxwell 3D software. The experiment shows that a high-density plasma is generated by the index impulse discharge, and the density of plasma rises with the increase of soacing between electrodes.
出处
《真空》
CAS
2012年第3期92-94,共3页
Vacuum
关键词
真空
指数脉冲
等离子体
探针法
生成特性
vacuum, index impulse
plasma
probe method
generation characteristics
