基于PSD的微位移传感器建模的实现方法

Realization of PSD-based micro-displacement sensor modeling

为了正确反映基于光电位置敏感器(PSD)的微位移传感器的特性,首先介绍了一维光电位置敏感器的工作原理并分析了利用PSD结合光学三角测量法将位移信号转换成电压信号的工作原理,得出基于PSD的微位移传感器被测试件位移量与相关测量电路输出电压(S,V)关系特征,然后基于最小二乘估计算法基本原理,提出了运用MAT-LAB语言建立PSD的微位移传感器(S,V)关系特征的数学模型的方法,给出了建模的程序流程图以及仿真结果。

In order to properly reflect the characteristics of PSD-based micro-displacement sensor, this paper begins with an introduction of the working principles of the one-dimension photoelectric position sensitive detector, and the working principles of characteristic relationship （S, V） between the displacement amount of tested specimens and the output voltage of relative measuring circuits is also described. Then a mathematical modeling approach of PSD-based micro-displacement sensor relation feature （S,V） is proposed based on the basic principles of least squares estimation algorithm via the language of MATLAB, and the modeling program flowchart and the simulation results are provided as well.