毫米波组件腔体工艺设计与制造

The Design and Manufacture Technology for the Cavity of Millimeter-wave Module

毫米波组件腔体具有高导热、高导电与气密封装要求,是实现毫米波组件功能的关键部件。针对其多波导腔、多孔、多薄壁的复杂结构特点和高尺寸精度、高形位精度、高表面精度的工艺特点,结合微组装焊接和气密封平行缝焊要求,设计与制造了钢—铜—钢夹层结构,应用CAD/CAM一体化技术、精密装夹技术和超声波技术,保证腔体加工微变形与波导腔无损伤去毛刺,实现了毫米波组件腔体的精密成型,满足了毫米波组件的技战术要求。

The cavity of millimeter-wave module （CMM）, which has the requirements of high thermal conductivity,high-conductivity and hermetic package,is the key part to realize the function of millimeter-wave module.The structure of the cavity is coplex because of holes,thin walls and too many waveguidu cavities.High precision of its dimension and surface and the accuracy of form andu position are also acquired in the manufacturing process.FuUy considering the requierments of micro-assembly welding and gas-seal parallel weld-seam, this paper introduces a steel-cooper-steel sandwich structure,in which we use the integration technology of CAD/CAM and the technology of precise clamping and ultrasonic wave in order to ensure micro-deformation in the cavity processing and burring of the waveguide cavity without damage.At last,the new manufacturing technology has realized the precision molding of the cavity of millimeter-wave module and the technical-tactics requirements.