相移散斑干涉计量中包裹相位误差研究

The Research on Decreasing of Wrapped Phase Deviation in Phase-shifting Speckle Interferometry Metrology

介绍了相移散斑干涉计量中获得包裹相位的2种基本方法——差值相位法、相位差值法,通过模拟漫射体产生离面倾斜散斑干涉图的Matlab程序计算了不同平均窗口、平均次数、系统孔径下的相位误差。结果表明,采用各向异性窗口多次平均、增大系统孔径的相位差值方法能减小相位误差。

The phase-of-difference and difference-of-phase that derive wrapped phase from phase-shifting speckle interferometry metrology are introduced in this paper and the deviation of phase is calculated through Matlab program producing out-of-plane tilting speckle interferograms for different averaging kernels,averaging times,aperture size respectively, and the results show that phase deviation could be decreased if repeating anisotropy kernel of averaging or increasing aperture size is adopted in difference of phase.