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压电驱动器布置对光栅拼接误差的影响 被引量:1

Effect of arrangement of piezoelectric actuators on grating tiling error
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摘要 分析了两种光栅拼接调整机构(三角形和L形),利用有限元分析软件对这两种光栅调整机构进行了模态分析和优化分析设计。相同光栅尺寸下(以口径为450mm×420mm×60mm光栅为例),驱动器三角形分布的固有频率与L形分布的固有频率相差无几,一阶频率分别为58.816Hz和58.864Hz。对两种驱动器布置方式引入的误差进行了分析比较,计算结果表明:三角形调整机构的最大误差比L形的大,同时三角形分布控制算法较L形的复杂。在主动控制中三角形模型误差迭代次数多,不利于控制。因此L形的压电驱动器布置方式优于三角形。 The paper investigates two kinds of grating tiling adjustment mechanisms(equilateral-triangle-shaped and L-shaped arrangements of piezoelectric actuators).Modal analysis and optimization analysis of the two mechanisms are performed by the software ANSYS.Optimization results show that,for tiled gratings of the same size,the natural frequencies of both mechanisms are almost the same.The tiling errors of the two adjustment mechanisms are analyzed and compared.The results show that the maximum error of L-shaped adjustment mechanism is smaller,and its control algorithm is simpler.Moreover,its error iteration time is smaller.Thus L-shaped layout of piezoelectric actuators is superior to equilateral-triangle-shaped one.
出处 《强激光与粒子束》 EI CAS CSCD 北大核心 2012年第6期1295-1300,共6页 High Power Laser and Particle Beams
基金 国家高技术发展计划项目 重庆大学个人创新基金项目(CDJXS11110024)
关键词 光栅拼接 优化分析 误差分析 调整机构 压电驱动器 grating tiling optimization analysis error analysis adjustment mechanism piezoelectric actuators
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参考文献10

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二级参考文献38

共引文献5

同被引文献17

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