还原炉电极外套强制冷却装置的研究

Study on Forced Cooling Device of Electrode Sheath for Reduction Furnace

分析了常用的还原炉电极外套强制冷却装置在技术上的不足,提出了新的强制冷却装置的设计方案。新的冷却装置在实际应用中取得了很好的效果,从而保证了多晶硅的产量和质量。

The technical shortcomings of electrode sheath forced cooling device of conventional reduction furnace were analyzed, and new design of forced cooling device was put forward. The new cooling device showed excellent effects in practical application, and guaranteed the yield and quality of polysilicon.