基于MEMS技术的微型磁性开关阵列

Micro Magnetic Switch Array Based on Mems

为了在二维微驱动系统中实时检出移动块的存在位置 ,试制了一种基于MEMS工艺的微型磁性开关阵列 ,它作为一种位置传感器通过扫描查询方式工作。本文对该传感器的工作原理、制作工艺做了详细的描述 。

In order to sense the presence of slider in a two-dimensional micro electronic mechanical system(MEMS), the authors proposed and developed a novel micro magnetic switch array, which is used as a position sensor and functions by scanning. This paper introduces its sensing principle, fabrication process and some experimental results.