纳秒单脉冲激光诱导AgInSbTe薄膜的相变特性

Phase Change Properties of AgInSbTe Thin Films under Single Nanosecond Laser Pulse Irradiation

利用磁控溅射法在K9玻璃基底上制备了Ag8In14Sb55Te23(AIST)纳米薄膜,并利用激光抽运-探测技术测量了薄膜的时间分辨反射率变化特性。研究结果表明,在合适能量密度的单脉冲纳秒激光脉冲作用下,AIST薄膜可以快速从沉积非晶态转化为晶态结构,晶化过程包含中间熔化态。在较低能量密度范围内,反射率变化量和晶化时间都随能量密度变化呈线性增加趋势。

Ag8In14Sb55Te23（AIST） films are deposited on K9 glass substrates by DC magnetron sputtering.A pump-probe system is employed to observe reflectivity change process in real time.The results show that phase transition driven by nanosecond laser pulses can be achieved in a proper fluence range on AIST thin films.The presence of liquid phase is identified by transient reflectivity level between those of the amorphous and crystalline phases.Crystallization time and reflectivity change are linearly proportional to the energy at lower pulse fluences.