基于MEMS的液压系统V锥传感器的仿真研究

Simulation study on MEMS V-cone sensor in hydraulic system

在液压系统中,由于液压传动的特点以及液压油的局限性,在针对流量的测量过程中,目前很难找到比较理想的动态测量仪表。为了改善这一现状,在应用压力梯度法测量液压系统流量研究的基础上,将先进的MEMS技术与传统V锥流量传感器相结合,提出一种在管内直接获得压差信号,进而测得流量的新方法。同时推导了流量-差压数学模型,并利用Fluent仿真了V锥体关键参数（前锥角θ及等效直径比β）对流场性质的影响,仿真结果表明：前锥角的最佳取值范围为45°-60°,等效直径比的最佳取值范围为0.75－0.85。

In the hydraulic system, because of the characteristics of hydraulic drive and the limitation of the hydraulic oil, it is hard to find an ideal dynamic measurement instrument in the process for flow measurement today. In order to improve this situation, on the basis of research on hydraulic flow measurement applied the pressure gradient method, combined the advanced MEMS technique with the traditional V cone flow sensor, a new method which obtained the dif- ferential pressure signals directly in the pipe to measure the flow was proposed. Then the differential pressure-velocity model was deduced, and the influence on flow field caused by key parameters （the fore cone angle 0 and the equivalent diameter ratio β） of V cone was simulated by Fluent. The simulation results show that the best value range of the fore cone angle is 45°-60°, the best value range of the equivalent diameter ratio is 0.75-0.85.