原位动态电子显微学研究进展

Progress in Dynamic in situ Electron Microscopy

随着电镜内原位技术的不断成熟和发展,透射电子显微镜不再仅仅是材料结构表征的工具,还是实现高精度纳米加工、性能测试等的重要手段。这不但丰富了纳米尺度下开展实验研究的方法,也拓宽了透射电子显微镜的应用范围,为纳米科学与技术的迅速发展提供了新的契机。本文侧重作者所在研究小组的研究工作,以"将纳米实验室建在透射电子显微镜里"的构想为主线,从材料的原位生长、结构加工、性能表征和器件构建等四个方面综述了近年来基于透射电子显微镜的代表性原位实验研究进展。

With the continuous improvement of in situ techniques inside transmission electron microscope （TEM）, the capabilities of TEM extend beyond structurual characterization to high-precision nanofabrication and property measurement, which not only enriches the experimental methods and broadens the application field of TEM, but also provides new opportunities for the development in nanoscience and nanotechnology. Based on the idea of ＂setting up a nanolab inside a TEM＂, we review the recent progress in dynamic in situ electron microscopy including in situ growth, nanofabrication, in situ property characterization and nanodevice construction.