摘要
利用化学沉淀法制备 Sn O2 纳米材料 ,再利用平面丝网印刷技术制备不同膜厚的 Sn O2 厚膜型气敏器件试样 ,测量不同厚膜气敏器件试样对甲烷气体检测灵敏度和阻温曲线 ,并进行复阻抗分析。实验表明试样膜厚对检测灵敏度的影响是明显的 ,试样膜厚在 5 3μm左右对甲烷气体有最大灵敏度。
The effects of film thiness on the gas sensing properties of SnO 2 thick film sensors were explored by measuring the methane gas sensitivity,the variations in resistance with temperature and analyzing the complex impedance plots.The nanoparticles were synthesized by chemical precipitation method and films were prepared by standard screen printing technology.The results showed that the sample was 53μm thick having the maximum sensitivity.
出处
《半导体技术》
CAS
CSCD
北大核心
2000年第2期23-25,共3页
Semiconductor Technology
基金
海南省自然科学基金资助项目!( 5 980 1)
