云纹干涉法测试技术研究

Study on measurement technology of moire interferometry

在阐述云纹干涉法基本原理的基础上,分析了具体实现云纹法干涉过程中,因非严格对称入射而造成的不可避免的误差。首次推导出实现云纹干涉法零场时,两入射光束实际满足的一般条件:sinα+sinβ=2λf,理论推导中所用的条件:sinθ=λf只是一般条件的理想情况。

Moire interferometry is a ultra-high sensitivity measurement method.So its error analyzing is very necessary.In the paper,a systematic error in moire interferometry experiment is found and analyzed on the basis of its basic theory.The general condition that two incident light beams to get zero field should be satisfied really for,sinα+sinβ=2 λf ,is deduced for the first time.sin θ=λf used in theoretical deducing is an ideal condition only when the incident angles of the beams satisfy the relation:α=β.At last,the measurement error in moire interferometry and its solution are discussed.