Analysis of SOI-MEMS Electrostatic Vibration Energy Harvester

Analysis of SOI-MEMS Electrostatic Vibration Energy Harvester

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机构地区 Collaborative Microelectronic Design Excellence Centre

出处《通讯和计算机（中英文版）》 2012年第5期596-601,共6页 Journal of Communication and Computer

关键词振动能量 MEMS 收割机 SOI 静电电能量采集系统最大输出功率制作设备 Energy scavenging, vibration to electricity conversion, electrostatic scavenger.

参考文献5

1H. Okamoto, T. Suzuki, K. Mori, Z. Cao, T. Onuki, H. Kuwano, The advantages and potential of electret-based vibration-driven micro energy harvesters, Int. J. Energy Res. 2009 (180-1190).
2S. Meninger, T.O Chandrakasan, J. conversion, in: Mur-Miranda, R. Amirtharajah, A. Lang, Vibration-to-electric energy Proceeding of Symposium onLow Power Electronics 1999, pp. 48-53. International and Design,.
3F. Maier, M. Sturmlechner, S. Dierneder, Novel energy harvester with low friction losses, in: proceeding of 6th International Multi-Conference on Systems, Signals and Devices, 2009, pp. 1-6.
4G.D. Pasquale, E. Brusa, A. Soma, Capacitive vibration energy harvesting with resonance tuning, in: Proceeding of Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 2009, pp. 280-285.
5B.C. Yen, J.H. Lang, A variable-capacitance vibration-to-electric energy harvester, IEEE Transactions on Circuits and Systems 53 (2006) 288-295.

通讯和计算机（中英文版）

2012年第5期

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