摘要
介绍一种基于数字ＰＩＤ方法，研制出微机控制系统，实现了压电陶瓷微位移器动态性能的改善，并将其用于精密微动平台，实现平台精密快速进给。
Based on digital PID control a control system based on mi-crocomputer is developed to improve the dynamic characteristic of piezo-ceramic micro displacement unit. The system has been used in the precise micro motion bench to implement precise and fast speed feeding.
出处
《自动化仪表》
CAS
北大核心
2000年第4期14-16,共3页
Process Automation Instrumentation
关键词
压电陶瓷微位移器
动态特性
PID调节
微动平台
Piezo-ceramic micro displacement unit Dynamic characteristic Characteristic correction PID controller Micro motion bench
