光栅线距测量仪的设计

Instrument for the Diffraction Grating Line Measurement

采用测量光束衍射角的方法,设计了一种作为标准块的光栅线距测量仪。实验表明,在实验室条件(20±1)℃,(760±10)mmHg的工作条件下,该测量仪可以测量线距800nm的光栅,测量不确定度在10-5。

An instrument as a standard block for the diffraction grating line measurement is pres- ented. The experimental results show that the measuring instrument can measure the line-space grating 800nm, measurement uncertainty is in 10-5 in the laboratory （20 ± 1） ℃, （760 ± 10） mmHg working conditions.