ZrO_2陶瓷表面Cu-Ti复合渗镀研究

Research on the Surface Metallization of ZrO_2 Ceramic by Means ofComposite Diffusion Cu-Ti Composite Diffusion Coating

应用加弧辉光复合渗镀技术和自制Cu-Ti二元金属复合靶,对ZrO2陶瓷表面进行Cu-Ti复合渗镀。采用X射线能量色散谱分析(EDS)、扫描电子显微镜(SEM)面扫描、X射线衍射(XRD)、声发射划痕等试验方法对渗镀层的元素组成、成分分布、相组成、界面结合强度进行分析测试。结果表明渗镀层中存在Cu、Ti及Fe元素,各组分分布较为均匀,没有明显的成分偏聚现象;渗镀层由Cu2Ti、Cu2Ti4O、Ti8O15组成;渗镀层与陶瓷基体结合良好,在100 N最大载荷下未出现剥离和崩落现象。

Ti and Cu were deposited on ZrO2 ceramic surface with composite diffusion coating technology by arc-added glow discharge and Cu-Ti composite target.The diffusion coating alloy-layer and the combining interface were tested by EDS,SEM,XRD and sound emissive scratching test（SEST）.It was indicated that the elements of Cu,Ti and Fe of diffusion-coating alloy layer were distributed uniformly.There was no obvious composition gathering.XRD result indicated that the diffusion-coating alloy layer was composed of Cu2Ti,Cu2Ti4O and Ti8O15.SEST was used to test the bonding strength between alloy layer and ZrO2 ceramic.It indicated that no stripped layer was found under the maximum load of 100 KN.