基于超声原子力显微镜的检测技术及应用研究

Detecting Technology Based on Ultrasonic Atomic Force Microscopy and Its Application

随着纳米材料和纳米技术的发展,对纳米级横向分辨率弹性测量及对次表面缺陷纳米范围成像方法的需求日趋增加,而目前传统的测试方法无法满足纳米尺度的弹性及次表面缺陷的检测。本研究提出的超声原子力显微镜技术,将原子力显微镜与超声方法相结合,即通过使原子力显微镜探针的悬臂梁或被测试件作超声振动,实现在纳米或亚微米尺度无损检测材料的弹性性能。本文基于原子力显微镜,通过激励试样底部的传感器,并采用锁相放大器调制出悬臂梁的振幅,构建了超声原子力显微镜系统,理论分析了超声原子力显微镜的悬臂梁超声振幅成像机理,通过实验得到SiO_x纳米薄膜的超声幅值影像。

With the development of nano - materials and nanotechnology, the elastic property measurement with the nano - scale lateral resolution and nano - scale subsurface defect technique imaging method are in good demand. Traditional measur ing technologies can＇ t meet the demand. In this paper, the technology based on the ultrasonic atomic force microscopy was proposed, which combined the atomic force microscopy and ultrasonic. In this system, the micro - cantilever of the atomic force microscopy probe or tested sample was excited at ultrasonic frequency, and the elastic property was measured at nano - sclae or sub micro - scale. The ultrasonic atomic force microscopy system was obtained after excitig the sensor under the tested sample and modulating the amplitude of cantilever using the lock - in amplifier. The ultrasonic amplitude imaging was analyzed theortically and ultrasonic amplitude imaging of SiO nanometer film was also obtained experimentally