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超临界CO_2环境中沉积薄膜材料的研究进展 被引量：2

Recent Progress on Film Deposition in Supercritical CO_2
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摘要 介绍了超临界流体沉积技术的基本原理及其沉积过程中的影响因素,综述了国内外关于超临界流体沉积技术制备金属、合金及氧化物薄膜材料的研究进展,并展望了今后的研究趋势。 The principle of supercritical fluid deposition （SCFD） and the factors which influence the deposition process are introduced, research progress on preparation of metal, alloy and oxide films by SCFD technique is re viewed. And possible research directions in the future are also suggested.
作者 赵明涛 张艳飞 赵斌 杨俊和
机构地区 上海理工大学能源与动力工程学院 上海理工大学材料科学与工程学院
出处 《材料导报》 EI CAS CSCD 北大核心 2012年第11期56-60,共5页 Materials Reports
基金 国家自然科学基金(50901086) 浙江省钱江人才计划(2010R10047) 宁波市自然科学基金(2009A610008)
关键词 超临界流体 沉积 二氧化碳 薄膜 supereritical fluid, deposition, CO2, thin film
分类号 TB383 [一般工业技术—材料科学与工程]
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参考文献28

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二级参考文献34

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共引文献51

同被引文献87

  • 1李权才,王星星,雷卫宁,刘维桥.表面活性剂对超临界CO_2流体金属镍电铸层的影响[J].稀有金属材料与工程,2012,41(S2):719-721. 被引量：1
  • 2刘维桥,雷卫宁,曲宁松,李小平,刘玉峰.基于SCF-CO_2电沉积制备纳米材料的研究进展[J].稀有金属材料与工程,2010,39(11):2064-2068. 被引量：7
  • 3滕新荣,顾书英,任杰.超临界CO_2中制备聚乳酸/羟基磷灰石复合支架材料[J].材料导报,2005,19(9):114-117. 被引量：6
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材料导报
2012年 第11期

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