异丙醇溶液中电化学法制备类金刚石薄膜的研究

Deposition of Diamond-like Carbon Films from 2-Propanol by Liquid Electrochemical Technique

采用电化学方法,以分析纯的异丙醇溶液作为碳源,低温(60～70℃)常压条件下,在(100)硅片上沉积了类金刚石薄膜。利用扫描电子显微镜(SEM)、原子力显微镜(AFM)、拉曼光谱仪(Raman)和傅里叶变换红外光谱仪(FTIR)表征了薄膜的表面形貌和结构。结果表明,电解异丙醇溶液可以获得表面均匀致密且sp3碳含量较高的含氢类金刚石薄膜。

Diamond like earbon（DLC） films were deposited by liquid electrochemical technique using 2-propanol as electrolyte at low temperature （60-70℃）. The morphology and microstructure of the films were analyzed by scan ning electron microscopy（SEM）, atomic force microscopy（AFM）, Raman spectroscopy and Fourier transform infrared spectroscopy（b-FIR）. The characterizations suggested that hydrogenated DI.C films with smooth and uniform surface and significant sp：~ carbon were successfully deposited.