热驱动薄膜式微型泵性能的初步分析

The Preliminary Study on Characteristics of Thermal Actuated Micropump

对热驱动微型泵的关键部件——铝—硅复合膜片进行了数值计算和分析。发现存在一个合适的交变加热频率范围 ,使单位时间泵腔体积变化量达到最大 ;铝膜形状取为圆形比环形有利于得到更大的泵腔变形体积。

The Characteristics of aluminumsilicon composite membrane of a thermal actuated micropump have been numerically analyzed. It is the fact that an appropriate range of frequency causes the largest volume changes of the micropump's chamber in unit time. Circular aluminum membrane is more advisable than annular one. The stroke volume of the chamber is enlarged when the thickness of aluminum membrane is increased or that of silicon membrane is decreased.