电子光学系统的GADFP组合优化方法

The Optimization of an Electron-optical System Combined Genetic Algorithm with Variable Scale Method

首次提出了将遗传算法 (GA)和变尺度法 (DFP)相结合的电子光学系统设计的组合优化方法。该方法首先用模拟自然界生物进化过程的全局优化搜索方法— GA以像差系数为目标函数进行优化 ,得到电子光学系统轴上电位分布 ,然后根据上述轴上电位分布以解析法中的 DFP变尺度法进行优化 ,求出系统的几何结构参数和电参数。通过对等径四电极扩展场静电透镜 (4EFL)的优化设计 。

A new optimal design method of an electron-optical system combined genetic algorithm(GA) with variable scale method is described. With this, the optimal distribution of potential along axis of an electron-optical system can be searched with a criterion of minimum aberration coefficients using genetic algorithms, and then the optimal structure and the corresponding electrical parameters of it can be searched using variable scale method. As an example, we study an extended field lens(EFL).The results is effective and robust.