摘要
分析了悬臂梁微型阀的静态过流特性 ,得到了阀的静态压差 -流量曲线并与实验结果比较。采用悬臂梁的振动微分方程分析了悬臂梁式微型阀的动态过流特性。当阀片两侧的压差随时间变化时 ,阀片的启闭与压差的变化之间存在一定的相位差 ,有可能引起泄漏甚至反向流动。对阀片的几何尺寸对动态过流特性的影响进行了分析。
In this paper, The static characterization of cantilever microvalve was analyzed. The relationship between static pressure difference and flow rate was obtained and was compared with the measured value. The dynamic characterizations of cantilever microvalve were analyzed based on oscillation equation. When the pressure difference changes with time, a phase shift will occur between the transient pressure difference and displace of valve flap, which could cause leakage and even reverse flow. The effect of thickness on performance of the valve was obtained.
出处
《仪表技术与传感器》
CSCD
北大核心
2000年第3期38-40,43,共4页
Instrument Technique and Sensor
基金
国家自然科学基金
