摘要
超精密加工是现代制造技术的一个重要组成部分 ,是众多大型系统实现简化设计和扩展功能的必要基础。几十年来 ,超精密加工技术在精度和手段上都有了质的飞跃。依据超精密机床各子系统的功能特点 ,介绍了超精密加工的共性技术及其最新发展动态 ,最后阐述了提高超精密加工精度的途径和方法。
Ultra precision manufacturing is as an important branch of modern manufacturing technology, as being the essential basic for compact design and increasing functions of large system. For several decades, ultra precision manufacturing technology has qualitative changes not only in aspect of accuracy but also of method. Common technologies, according to characteristics of various subsystems of ultra precision machine tools as well as its recent development are introduced. Finally, approaches and methods for increasing accuracy of ultra precision manufacturing are discussed in detail.
出处
《中国机械工程》
CAS
CSCD
北大核心
2000年第1期177-179,共3页
China Mechanical Engineering
基金
国防科技预研资助项目! ( 18.6.1.2 )
关键词
超精密加工
共性技术
误差补偿
超精密机床
ultra precision manufacturing
common technology
error compensation
