超薄六维力/力矩传感器优化设计及其解耦

Optimal Design of a Thin Six-dimensional F/T Sensor and its Nonlinear Decoupling

为降低六维力/力矩传感器的高度尺寸对基座和驱动部件引起的附加力矩,结合有限元分析法、SDO方法和神经网络方法,设计了一种新型的基于应变检测原理的超薄六维力/力矩传感器,其高度尺寸可控制在15mm以内.为进一步提高设计的六维力/力矩传感器的精度,对其进行非线性维间解耦和标定,实验结果表明,传感器精度性能优良,最大线性度误差为0.15%F.S.,其设计和优化过程正确合理,最大耦合误差为1.6%F.S.,各维在满量程时的输出相等,具有各维同性.

In order to decrease the additional moment caused by the height dimension of the six-dimen- sional F/T sensors, a novel thin six-dimensional F/T sensor with its height dimension below 15 mm was designed based on strain measurement with FEA, SDO, and ANN methods. Nonlinear decoupling and cal- ibration of the sensor was performed to increase the performance of the sensor. The results of the calibra- tion experiment show that the developed sensor possesses high performances and the design and optimiza- tion are rational, and its maximum nonlinearity error and the maximum coupling error are 0.15 %F. S. and 1.6 %F. S. respectively.