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DMD数字微镜驱动控制系统分析及其应用 被引量:3

DMD Digital Micromirror Driving Control System Analysis and Its Application
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摘要 数字微反射镜器件(DMD)是数字式光处理(DLP)投影显示技术的核心,有着巨大的应用潜力。叙述了DMD的控制原理和特点。首先,基于DMD数字微镜控制器的驱动控制系统和采用二进制脉宽调制(BPWM)技术精确控制光源,接收PC机传输的实时图像显示数据,生成控制DMD翻转的控制时序及其复位脉冲信号,搭建了蓝光半导体激光投影光刻装置,实现了高分辨率灰度图像的分层曝光和曝光量的精确控制;其次,基于DLP投影系统,采用RGB激光源,通过光纤耦合和合束,建立了激光投影实验装置。 Digital micro-mirror device (DMD), the key technology in digital light processing (DLP) projection display, has great potential in various areas. This paper studies the principle and characteristic of DMD control. First, a 405 nm diode laser photolithography system is built. The data of PC screen image is transferred to DMD driver by software using binary pulse width modulation (BPWM) technology. The data is then rewritten into a control single which finally directs the DMD. Thus a high resolution gray image stratified exposure and accurate control of exposure is achieved. Also a multicolored laser projection experimental system is set up. Lasers from RGB sources are combined by a fiber-optic coupling system. The laser is then led into an existent DLP projection system and a simple test device is accomplished.
出处 《应用激光》 CSCD 北大核心 2012年第3期212-216,共5页 Applied Laser
基金 上海市科学技术委员会应用技术开发专项资金资助项目(项目编号:2010-212)
关键词 DMD DMD驱动控制 二进制脉宽调制 灰度投影光刻 DLP技术 激光投影 DMD DMD drive control binary pulse width modulation gray-level projection photolithography DLPtechnology laser projection
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