喷雾电化学放电加工难导电硬脆材料试验研究

Experimental Investigation of Difficult-to-conductive Hard and Brittle Materials with Mist-jetting Electrochemical Discharge Machining

针对传统电解电火花加工难导电硬脆材料存在的问题,提出了一种使用开槽金属轮作为一极,另一极为紧贴工件表面的进电金属片的喷雾电化学放电加工方法,对单晶硅和氧化铝陶瓷进行了试验研究,并加工出了窄槽实物。通过分析加工表面微观形貌可知,单晶硅等半导体材料主要依靠电化学腐蚀、电化学放电和化学溶解进行综合蚀除,氧化铝陶瓷等绝缘材料经电化学放电通常只能产生软化层,再由机械方法实现延性方式去除。最后研究了峰值电压、脉冲宽度、脉冲间隔、电解液浓度、开槽金属轮转速等因素对单晶硅和氧化铝陶瓷材料去除率和表面粗糙度值的影响规律。

Specified to the existing problems of traditional electrochemical discharge machining lor difficult-to-conductive hard and brittle materials, a new method named mist-jetting electrochemical discharge machining with slotted metal wheel as an electrode and conductive sheet metal which pressed to workpieces surface as another electrode is proposed, experimental investigations are carried out on single crystal silicon and Al2O3 ceramic, and the narrow slot entities are machined. The machining surface microstructures are analyzed to get that, the erosion methods are electrochemical corrosion, elec- trochemical discharge and chemical dissolution for semiconductor such as silicon; and for the insulating materials such as Al2 O3 ceramic, electrochemical discharge can only make soften layer which then removed by mechanical way through ductile regime method. At last, the effects of parameters such as peak voltage, pulse width, pulse interval, electrolyte concentration and rotation speed of slotted metal wheel on material removal rate and surface roughness of single crystal silicon and Al2 O3 ceramic are researched in detail.