Y^(3+)掺杂ZnO薄膜的结构及性能研究

Optical and Structural Characteristics of Y^(3+)-doped ZnO Films

采用溶胶-凝胶法在玻璃衬底上成功制备出Y3+掺杂的透明ZnO薄膜。通过X射线衍射仪(XRD)、扫描电镜(SEM)和紫外分光光度计分析了掺杂Y3+对ZnO薄膜结构和性能的影响。结果表明:Y3+成功掺入氧化锌的晶格内;随着掺杂浓度的提高,薄膜的透光率并未表现出一定的规律性;随着退火温度升高,薄膜的透光率明显得到提高;在530℃退火时,薄膜的表面形貌形成网状结构且透光率达到70%左右。

y3＋-doped ZnO films were fabricated on glass substrate by sol-gel process. The structural and photoluminescenee characteristics of the y3＋-doped films were analyzed by X-Ray Diffraction （XRD）, Scanning Electron Microscope （SEM）, and UV speetrophotometer. It is indicated that it is feasible to prepare Y3＋-doped ZnO films with Sol-gel method. The y3＋ incorporation does not change the lattice structure of ZnO. y3＋ entering into the lattice of ZnO makes the lattice distortion occur. Under the conditions of low doping concentration and high annealing temperature, the films can obtain better surface morphology and transmittance.