扫描电镜中颗粒能谱定量分析的质量效应

Mass Effect of Particle Energy Dispersive Spectrometer Quantitative Analysis in Scanning Electron Microscope

利用扫描电镜和能谱仪对精密合金中第二相颗粒的表面形貌和化学成分进行了分析,研究了颗粒能谱定量分析的质量效应。结果表明:颗粒能谱定量分析时有明显的质量效应;颗粒与基体的成分差异越大,质量效应越明显,加速电压对质量效应也有影响;颗粒能谱定量分析中存在一个临界尺寸,当颗粒尺寸大于临界尺寸时,质量效应消失;由于样品抛光表面上颗粒的二维表观尺寸与实际的三维尺寸不尽相同,使得质量效应的表观临界尺寸有别于理论临界尺寸,但颗粒能谱定量分析质量效应的变化趋势和统计规律是十分明显的。

Morphology and compositions of the second particles in precision alloy were analyzed by scanning electron microscopy（SEM） with energy dispersive spectrometer（EDS）,and mass effect of particle EDS quantitative analysis was studied.The results show that the mass effect is obvious during particle EDS quantitative analysis.The different of compositions between the particles and matrix is bigger,the mass effect is more obvious,and influences of accelerating voltage on mass effect are also observed.It was found there is a critical size during particle EDS quantitative analysis,and the mass effect disappears when the particle size is bigger than the critical size.The two dimension size of the particle of the polished surface is different from the actual three dimension size,so the critical size characterized by the mass effect is different from the theoretical critical size.But the variety tendency and the statistics laws that researched by the mass effect of particle EDS quantitative analysis are very obvious.