摘要
采用SOI(silicon-on-insulator)材料,设计并制作了双岛敏感结构,通过绝缘层隔离,消除PN结噪声,提高信噪比、线性度及重复性。利用敏感电阻的温度特性直接测量环境温度,进行温度补偿,提高了补偿的准确性,最后通过试验数据说明传感器的精度达到了气象使用要求。
In this paper, a novel atmospheric pressure sensor was researched by using SOl （silicon on insulator） materials and fabricated with double-islands structure. The insulated isolation layer was used to eliminate the PN-junction noise, therefore the performances, such as SNR, linearity, repeatability, etc, were improved. The practical temperature, measured by using the temperature characteristic of the sensitive resistance, was used in temperature compensation to improve the veracity. The experiment data shows that the sensor s precision meets the requirement in meteorology.
出处
《电子测量技术》
2012年第6期1-4,共4页
Electronic Measurement Technology
关键词
高精度
气压传感器
温度补偿
气象
high-precision
atmospheric pressure sensor
temperature compensation
meteorology
