摘要
扫描近地的光显微镜学(SNOM ) 是在 nano 光的大小和描述的一个理想的试验性的测量系统。除有在衍射限制以外的分辨率的显微镜学以外,有纳米分辨率的分光镜和有新奇表演的另外的仪器为在 nano 光学和 nanophotonics 的研究是不可缺少的。这篇论文考察发展中的历史近地光(NFO ) 测量方法并且在未来预见它的前景。NFO 大小的开发通过了四个阶段,包括有超级分辨率,近地的光谱学, nanooptical 参数的大小,和近地的相互作用的察觉的光成像。为每个阶段,研究目的,工艺的性质和应用程序,领域被讨论。
Scanning near-field optical microscopy (SNOM) is an ideal experimental measuring system in nano-optical measurements and characterizations. Besides microscopy with resolution beyond the diffraction limit, spectroscope with nanometer resolution and other instruments with novel performances have been indispensable for researches in nano-optics and nanophotonics. This paper reviews the developing history of near-field optical (NFO) measuring method and foresees its prospects in future. The development of NFO measurements has gone through four stages, including optical imaging with super resolution, near-field spectroscopy, measurements ofnanooptical parameters, and detections of near-field interac- tions. For every stage, research objectives, technological properties and application fields are discussed.
基金
This research was supported by the National Natural Science Foundation of China (Grant No. 61177089).
关键词
扫描近场光学显微镜
光学测量
表征
展望
纳米光学
极限分辨率
SNOM
测量系统
scanning near-field optical microscopy(SNOM), near-field optical (NFO) measurement, super-resolution imaging, near-field spectroscopy, nano-optics,nanophotonics