硅光子器件及其集成技术的研究

Study of silicon photonic devices and their integration technology

主要探讨了偏振分集光路、可调光衰减器、波导耦合型锗光电探测器等硅光器件的研究进展,分析了其结构及技术参数,随后探讨了VOA-PD单片集成技术以及VMUX单片集成技术两种硅基单片集成技术,指出硅光子器件的性能指标已经能满足现代光纤通信系统的要求。

Various silicon photonic devices covering passive to active functions have been developed and their monolithically-integrated technology. This paper studies on polarization diversity circuit for silicon photonics, variable optical attenuator based on a silicon wire waveguide, germanium photodectectors and their technical parameters, then germanium photodiode and a variable optical attenuator integrated on a silicon wire waveg- uide platform, VMUX monolithic integration technology are followed. So the performance of silicon photonic devices have been able to meet the requirements of modern optical fiber communication systems.