SmCo基多元合金薄膜的成分调控研究

Investigation on the Mediated Composition of SmCo-based Multinary Alloy Films

基于溅射理论和分子热力学理论建立了SmCo基多元合金薄膜的成分调控模型,讨论了溅射参数对薄膜成分的影响规律。随后以Sm(Co0.62Fe0.25Cu0.1Zr0.03)7.5合金为靶材,采用磁控溅射工艺在单晶Si基片上制备了SmCo基多元合金薄膜,测试了不同溅射工艺制备薄膜的成分。结果表明:通过模型计算得到的薄膜成分对溅射参数的依赖关系与实验结果吻合,验证了模型的有效性。

Based on the sputtering theory and molecular thermodynamics theory, a mediated composition model of SmCo-based multinary alloy films was established, and the effect of sputtering parameters on the film composition was discussed. Subsequently, the SmCo-based multinary alloy films were deposited on Si substrates by magnetron sputtering from Sm（Co0.62Fe0.25Cu0.1Zr0.03）7.5 alloy target. The composition of the films prepared by different sputtering parameters was measured. The results show that the dependence of the film composition on sputtering parameters observed from the model agrees well with the experiment results, which gives a favorable support to the acquired model.