微谐振器的单端口静电激励—电容检测方法研究

Research on one-port electrostatic excitation and capacitive detecting method for micro-resonator

提出了一种基于频域分离法的单端口静电激励—电容检测方案,解决了同频激励的双端口谐振器的耦合干扰问题,同时,采用单一电极简化了结构,既方便加工,又使检测电容的有效面积达到最大。通过对输出电流谐波组成成分的分析,选择了倍频激励方式;设计了谐振器的单端口静电激励—电容检测系统样机。实验结果表明:该系统样机可以成功获取谐振器的开环特性曲线和谐振频率、Q值等参数,为下一步实现单端口谐振器的闭环打下了基础。

A one-port electrostatic excitation and capacitive detection method for micro-resonator based on frequency separation is presented. This method solves the problem of electrical cross-talk in two-port resonator under same-frequency excitation, meanwhile, the structure is simplified by using only one electrode, which not only makes manufacture convenient, but also maximizes the area for detecting capacitance. Double-frequency excitation is selected according to the results of harmonic analysis of the output current and experimental system is designed. The experimental results show that curve of open-loop character and parameters such as resonance frequency and Q-factor can be obtained using the experimental system, and this is the foundation for realizing closed-loop of the resonator in the future.