摘要
气体静压导轨是超精密工程的核心基础技术之一,其气膜振动是影响加工精度的主要因素。提出了一种气体静压导轨气膜厚度的电容式测试方法,将气体静压导轨的节流器工作底面与实验台面当作电容式传感器的2个极板,当气膜厚度发生变化时,电容将产生较大变化。通过测量节流器与工作面间的电容,计算得到气膜厚度值。同时建立了不同凹面节流器电容与气膜厚度的数学模型。实验利用电容测量仪与电感测微测头同时对气膜厚度进行测量,结果显示两者误差为0.42μm,为气体静压导轨气膜厚度的测量提供了新的方法。
The aerostatic bearing is one of the basic core techniques in the ultra-precision engineering, and the air-film vibration is one of the main factor affecting the manufacturing precision. A capacitive testing method for air-film thickness of aerostatic bearing is proposed, which takes the working surfaces of both the aerostatic reducer and the experiment table as two plates of the capacitive sensor. The capacitance greatly varies with the air-film thickness,thus the air-film thickness can be calculated by measuring the capacitance between them. Meanwhile, mathematical models concerning the capacitance and the air-film thickness of different concave reducer are established. In the experiments, the air-film thickness is measured by both the capacitance meter and the inductance micrometer simultaneously, and the results show that the error between two measuring values is 0.42 μm. It offers a new method for measuring the air-film thickness of the aerostatic bearing.
出处
《传感器与微系统》
CSCD
北大核心
2012年第7期67-69,83,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51075378)
浙江省自然科学基金重点资助项目(Z106280)
