摘要
采用扫描透射电镜 (STEM) ,研究了铝上磁控溅射沉积铀薄膜的形貌、组织、结构以及铀薄膜的生长模型。结果表明 :磁控溅射沉积铀薄膜是由微晶和非晶态两态组成 ,属层状 +岛状生长模型。
Model of growth, surface morphology, microstructure and of the Uraniun films by magnetron sputter deposition have been investigated by scanning transmission electron microscopy(STEM). The results indicate that magnetron sputtered Uranium films microstructure is composed of continuous, dense micro crystal islands and amorphous layer. Growing model of Uranium films is belong to layer+islands growth.
出处
《真空》
CAS
北大核心
2000年第3期22-24,共3页
Vacuum
关键词
铀薄膜
非晶态
生长模型
磁控油射沉积
magnetron sputtering
uranium film
amorphous
micro crystal
growing model
