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超精密研抛机床设计

Design of an ultra-precise polishing machine
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摘要 采用一种新的复杂光学曲面研抛方法,设计了一种可以实现研抛工具与工件之间相对位姿主动调整,并能高效、低成本加工创成非球面及自由曲面零件的超精密研抛机床。通过有限元分析软件ANSYS对机床进行了静力分析和模态分析,验证了所设计的机床结构合理。 machine is desi and processew a new polishing method for the complex optical gned. It can adjust the relative position between t e non-spherical surface and free surface with structure of the machine is reasonable through static analysis and analysis. he polishing tool and high efficiency and modal analysis by m recise polishing the workpiece, low cost. The cans of ANSYS analysis.
出处 《长春工业大学学报》 CAS 2012年第3期292-297,共6页 Journal of Changchun University of Technology
基金 吉林省科技发展计划基金资助项目(20080352)
关键词 研抛机床 复杂光学曲面 气浮转台 精密摆台 polishing machine complex optical surface air-bearing rotary stage precise swing stage.
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参考文献8

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二级参考文献3

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