摘要
对在线高纯多晶硅生产制备技术——改良西门子法和硅烷法的制备工艺进行了概述,比较了两种在线技术的优缺点,对两种在线技术的发展趋势进行了展望。
By summarizing the industrial preparation techniques of high-purity polysilieon including the improved Siemens process and the silane process, the advantages and disadvantages of the two industrial preparation techniques were compared. In addition, the development trends of the above two techniques were expected.
出处
《云南冶金》
2012年第3期75-79,共5页
Yunnan Metallurgy
关键词
高纯多晶硅
西门子法
硅烷法
high-purity polysilicon
Siemens process
silane process
