摘要
对纳米力学测量系统在准静态压人模式下的载荷因子、位移因子的量值溯源校准方法进行了研究。通过一组标准砝码产生标准载荷，拟合标准砝码质量和传感器输出电压得到载荷因子；利用激光干涉仪测量压针位移，拟合干涉仪位移值和传感器输出电压得到位移因子。采用标准样品对校准结果进行了试验验证，校准后的纳米力学测量系统在国际比对测量中取得了良好结果。
A study on the traceability and calibration method of the load and displacement scale factor of the instruments on the quasistatic nanoindentation mode is described. The load scale factor is the ratio of the displacement voltage, which can be obtained from a group of standard weights. The displacement scale factor represents the correlation between the displacement voltages and the displacement of the transducer. The calibration system has been tested by standard samples and been well verified in international comparison.
出处
《计量学报》
CSCD
北大核心
2012年第4期289-293,共5页
Acta Metrologica Sinica
关键词
计量学
纳米力学测量系统
载荷因子
位移因子
溯源
校准
Metrology
Nanomechanical measurement system
Load scale factor
Displacement scale factor
Traceability
Calibration
