PIND试验中水溶胶清洗方法研究

Research of hydrosol cleaning method in PIND test

国内PIND试验室对水溶胶的清除方法普遍存在诸多弊端,导致元件表面胶体残留过多,给后续试验带来质量隐患。在探讨了多种在用的清洗方法后,提出了"喷淋-循环"一站式清洗方案,在满足元器件的温度、表面保护、静电防护等要求的同时,清洗质量和清洗效率也有了极大的提高,最终研制出新型水溶胶清洗机。试验证明,新方法具有耗费低廉、使用方便、易于维护、可靠性高等显著优点,可极易推广至相似需求的中、小型PIND试验环境中。

The hydrosol cleaning methods adopted in domestic PIND laboratories have many ubiquity disadvantages, which lead to hydrosol residual and bring over hidden troubles for follow-up tests. A reliable and effective cleaning solution is proposed based on analysis of the commonly-used hydrosol cleaning method. The result proves that the new cleaning solution has the advantages of low cost, easy to use, easy maintenance and high reliability, etc. The system is extremely easy to spread to the medium or small test environments with similar demands.