摘要
采用直流磁控溅射法在Ti6Al4V表面制备TiN/Ti复合膜。分别用FESEM、GDEOS和XRD分析薄膜表面的成分及相结构;利用划痕仪分析膜基结合强度;通过球盘磨损机和轮廓仪测试磨痕形貌和磨损体积,评价膜层的摩擦学性能。结果表明,TiN/Ti复合膜表面致密光滑,呈金黄色金属光泽;膜基结合强度大于100 N;表面镀有TiN/Ti复合膜的Ti6Al4V合金虽没有减磨作用,但提高了耐磨性。
TiN/Ti film was deposited by DC magnetron sputtering on Ti6A14V surface. The surface and cross-section morphologies, composition and phase structure of TiN/Ti film were characterized by FESEM, GDOES and XRD, respectively. The adhesion between substrate and film was analyzed by scratch test. The wear resistance of TiN/Ti film was investigated by ball on disc wear test and white light interference. The results indicate that TiN/Ti films exhibit smooth surface and dense structure columnar crystal with cascade-like glacier feature, which can show well bonding strength and improvement of wear resistance.
出处
《热加工工艺》
CSCD
北大核心
2012年第14期148-150,共3页
Hot Working Technology
基金
山西省科技攻关项目(20110321051)
太原理工大学校发展科技基金项目(K201015)
