电场力显微镜不同探针对表面电荷注入的影响

Study the surface charge by electrostatic force microscope with different coating tip

在电场力显微镜(EFM)下利用不同金属镀层微探针,在微纳米尺度下对聚酰亚胺薄膜的表面电荷生成特性进行研究。采用电场力显微镜导电探针在聚酰亚胺薄膜表面注入电荷,并对微纳米区域产生的电荷进行表征,结果表明不同金属镀层的微探针对聚酰亚胺薄膜上电荷注入效果不同。铂铱合金镀层具有比钴铬合金镀层更高的功函数fm,因此前者在金属-电介质接触中产生更大肖特基势垒,进而降低了电荷的注入程度。该研究为微纳米尺度下探索聚合物绝缘材料表面电荷生成、发展机理提供了一个新的研究方法和途径。

Electrostatic force microscope （EFM） was applied to study the properties of surface charge on Polyimide films in micro- nanometer scale. The surface charge was generated by injecting on the surfaces of the polyimide （PI） films using the conductive probe of with different coating. After that the surface charge was characterized by EFM. The result indicates that it is difficult to inject charge with Pt/Ir coating tip for larger work function than Co/Cr coating because of Schottky effect between metal and dielectric. The research provides a new way for study on the rule and mechanism of surface charge on the insulated films.